TGV Chemical Wet Etching Equipment

Exclusive etching formula, nearly no consumption of etching solution, constant-concentration etching, and the diameter & thickness dimensions are consistent with theoretical values; a wide temperature control window for compatibility with low to high temperatures, with low sensitivity to the concentration and temperature of the etching solution; the surface roughness remains basically unchanged after etching.

咨询热线:
13556305903

设备简介


应用领域


设备特点

● 蚀刻液无消耗,恒定浓度蚀刻,直径和厚度尺寸与理论值一致

● 温控窗口宽,蚀刻液浓度温度不敏感,一致性好

● 蚀刻后表面粗糙度基本不变

● 满足无氟安全环保、低成本、高效率、高量产需求


工艺流程

◆ 上料

◆ 蚀刻

◆ 浸泡⽔洗

◆ 蚀刻

◆ 浸泡⽔洗

◆ 浸泡酸洗

◆ 浸泡⽔洗

◆ 慢提拉

◆ 烘⼲

◆ 下料




设备参数

项目

技术参数

加工尺寸 515*510mm,920*730mm 和12寸晶圆可选
孔径大小 >1.5um